LANANtek FA 2000系列探针台
技术参数
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LANANtek FA Laser Mark All in One 系列
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主要特点
●可选配高温测试环境
●可选直筒显微镜和体式显微镜
●载物台可Z轴升降
●载物台Theta可粗调360°，微调±7°
●载物台XY移动分辨率为1um。
●可选配高压高流测试环境
●快速装片并可任意位置锁定功能
●显微镜支架万向杆
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选配附件
●激光修复
●低漏电电流/电容测试
●射频测试探头及电缆
●探针卡/封装/PCB 板夹具
●有源探头
●高压高流模块
●高清数字相机
●Hot Chuck
●载物台水平调节机构
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应用领域
●Failure analysis 集成电路失效分析
●Wafer level reliability 晶元可靠性认证
●Device characterization 元器件特性量测
●Process modeling 塑性过程测试(材料特性分析)
●IC Process monitoring 制成监控
●Package part probing IC封装阶段打线品质测试
●ESD&TDR testing ESD和TDR测试
●Microwave probing 微波量测(高频测试)
●Solar太阳能领域检测分析
●LED、OLED、LCD领域检测分析、修复
●PCB领域检测分析
●VESEL DFB,COC,硅光等光电器件测试
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兼容测试仪器
●各种型号示波器
●各品牌半导体参数分析仪，博测，是德，泰克，概伦等
●各种品牌的网络分析仪，是德，罗德施瓦茨，思仪等
●各种品牌型号的源表
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LANANtek FA Laser Mark All in One 系列
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Built on the highly reliable flashlamp-pumped laser platform, the FiLaser FA-100 AIO laser system provides OEM customers
with a compact high energy laser system capable of delivering ~mJ pulse energies at 1064, 532, 355 and 266nm.
基于高可靠的闪光灯泵浦激光平台，FiLaser FA-100 AIO激光系统为 OEM客户提供了紧凑的高能激光系统，能够在1064、532、355和
266nm提供~mJ脉冲能量。
The air-cooled architecture eliminates the weight and complexity of water cooling, and allows the FA-100 to be packaged into a smaller
and lighter single box and nearly maintenance-free. As a result, FA- 100 can be easily mounted on most of the leading types of failure
analysis microscopes and gantry systems.风冷结构消除了水冷的重量和复杂性，并允许FA-100被包装成一个更小、更轻的单个盒子，几
乎无需维护。因此，FA-100可以很容易地安装在大多数主要类型的失效分析显微镜和龙门系统上。
FA-100 AIO laser system is truly a hands free laser system that is designed to provide great flexibility in defining laser characteristics.
User-selectable wavelengths (1064 nm, 532 nm, 355 nm or 266 nm) and precise energy control (with >1000 steps) match the laser beam
parameters to the tasks. A built-in shutter produces highly uniform cuts from 50 μm x 50 μm (with 50X objective) to 1 μm x 1 μm
(with100X objective). FA-100 AIO激光系统是一个真正的自由激光系统，旨在提供巨大的灵活性定义激光特性。用户可选择波长(1064 nm,
532 nm, 355 nm或266 nm)和精确的能量控制(与1000步)匹配激光束参数的任务。内置快门可以产生高度均匀的切割，从50 μm ×50
μm(50倍物镜)到1 μm ×1 μm(100倍物镜)
FA-100 is operated by a 24V DC source, and no additional power supply is needed. Proprietary optical design enables higher energy output without sacrificing operating lifetime, and ensures the best possible reliability and superior performance. FA-100由24V直流电源供电，无需额外电源。专有的光学设计可以在不牺牲工作寿命的
情况下实现更高的能量输出，并确保最佳的可靠性和卓越的性能
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Features:产品特点
• All In One design removes the power supply and umbilical一体化设计；
• Air-cooled, Compact, No maintenance Needed风冷、结构紧凑、免维护；
• 3 Operating modes: Single shot, Continuous (1 Hz), Burst (max. of 100 pulses at 5 Hz.)三种运行模式：单发模式 ，连续模式， BURST模式；
• Wavelengths Selectable for 1064 nm, 532 nm, 355 nm or 266 nm 波长可选：红外、绿光、紫外、深紫外；
• Cutting size from 1μm x 1μm (under100X objective) to 50μm x 50μm (under 50X objective).切割尺寸从1μm ×1μm(100倍物镜下)到50μm ×50μm(50倍物镜下)；
• Simple communication via USB or remote control box通过USB或远程控制盒进行简单通信；
• Precise energy control with >1000 Steps 精确能量控制＞1000步；
• Optional Internal CCD camera 选配内置同轴CCD相机；
• Internal LED or External Whitelight spot Marker 内置LED或外部点光源；
• Mountable on most Failure Analysis microscopes可安装在大多数失效分析的显微镜上；
Applications:应用
• Semiconductor Failure Analysis半导体失效分析；
• LCD Repair LCD面板修复；
• Micromachining 微加工；
• Resist Trimming 激光调阻修复
• Marking and Cutting 激光标记和切割
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